Ion Component Diagnosis of Metal Hydride Cathode Vacuum Arc Ion Source by Using an in-Cavity Minitype Magnetic Mass Spectrometer

Institute of Fluid Physics, China Academy of Engineering Physics

Metal hydride cathode vacuum arc ion sources can produce microsecond to millisecond intense pulsed proton beams, which are applied in many areas, such as accelerator injection and ion implantation. Generally, the ion components in metal hydride cathode vacuum arc are complicated and consist of numerous metal and nonmetal ions with different charge states. In this paper, we firstly review the methods and devices for ion component diagnosis of vacuum arc ion source used by former researchers. Then the technical features of a home-made in-cavity minitype magnetic mass spectrometer mass are introduced. By using this mass spectrometer, the ion components and their charge state distributions at different discharge moments are presented. The evolutions of different ion components with time are also given.